47 results
Strong visible light emission from silicon-oxycarbide nanowire arrays prepared by electron beam lithography and reactive ion etching
-
- Journal:
- Journal of Materials Research / Volume 30 / Issue 23 / 14 December 2015
- Published online by Cambridge University Press:
- 20 November 2015, pp. 3692-3699
- Print publication:
- 14 December 2015
-
- Article
- Export citation
On the effects of thermal treatment on the composition, structure, morphology, and optical properties of hydrogenated amorphous silicon-oxycarbide
-
- Journal:
- Journal of Materials Research / Volume 24 / Issue 8 / August 2009
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2561-2573
- Print publication:
- August 2009
-
- Article
- Export citation
MS2 Bacteriophage as a Biotemplate for Semiconductor Nanoparticle Synthesis
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1220 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1220-BB05-18
- Print publication:
- 2009
-
- Article
- Export citation
A study of ruthenium ultrathin film nucleation on pretreated SiO2 and Hf–silicate dielectric surfaces
-
- Journal:
- Journal of Materials Research / Volume 22 / Issue 8 / August 2007
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2254-2264
- Print publication:
- August 2007
-
- Article
- Export citation
Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemes
-
- Journal:
- Journal of Materials Research / Volume 22 / Issue 5 / May 2007
- Published online by Cambridge University Press:
- 03 March 2011, pp. 1292-1298
- Print publication:
- May 2007
-
- Article
- Export citation
Copper Electroplating on Zero-Thickness ALD Platinum for Nanoscale Computer Chip Interconnects
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F05-08
- Print publication:
- 2006
-
- Article
- Export citation
Study of copper-refractory metal interfaces via solid-state wetting for emerging nanoscale interconnect applications
-
- Journal:
- Journal of Materials Research / Volume 21 / Issue 1 / January 2006
- Published online by Cambridge University Press:
- 01 January 2006, pp. 255-262
- Print publication:
- January 2006
-
- Article
- Export citation
Spectroellipsometric characterization of Au-Y2O3–stabilized ZrO2 nanocomposite films
-
- Journal:
- Journal of Materials Research / Volume 20 / Issue 12 / December 2005
- Published online by Cambridge University Press:
- 01 December 2005, pp. 3320-3328
- Print publication:
- December 2005
-
- Article
- Export citation
Microstructure and Optical Properties of Au–Y2O3-stabilized ZrO2 Nanocomposite Films
-
- Journal:
- Journal of Materials Research / Volume 20 / Issue 9 / September 2005
- Published online by Cambridge University Press:
- 03 March 2011, pp. 2516-2522
- Print publication:
- September 2005
-
- Article
- Export citation
Electrical Properties of Ultrathin Al2O3 Films Grown by Metalorganic Chemical Vapor Deposition for Advanced Complementary Metal-oxide Semiconductor Gate Dielectric Applications
-
- Journal:
- Journal of Materials Research / Volume 20 / Issue 6 / June 2005
- Published online by Cambridge University Press:
- 01 June 2005, pp. 1536-1543
- Print publication:
- June 2005
-
- Article
- Export citation
Erbium-doped Amorphous- Si-C-O Matrix (a-SiCxOy:Er) - A Novel Silicon-based Material for Near-infrared Optoelectronic Applications
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 866 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, V6.5
- Print publication:
- 2005
-
- Article
- Export citation
Chemical vapor deposition of ruthenium and ruthenium oxide thin films for advanced complementary metal-oxide semiconductor gate electrode applications
-
- Journal:
- Journal of Materials Research / Volume 19 / Issue 10 / October 2004
- Published online by Cambridge University Press:
- 01 October 2004, pp. 2947-2955
- Print publication:
- October 2004
-
- Article
- Export citation
Photoluminescence at 1540 nm from erbium-doped amorphous silicon carbide films
-
- Journal:
- Journal of Materials Research / Volume 19 / Issue 8 / August 2004
- Published online by Cambridge University Press:
- 03 March 2011, pp. 2389-2393
- Print publication:
- August 2004
-
- Article
- Export citation
Chemical Vapor Deposition of ZnS:Mn for Thin-Film Electroluminescent Display Applications
-
- Journal:
- Journal of Materials Research / Volume 19 / Issue 3 / March 2004
- Published online by Cambridge University Press:
- 03 March 2011, pp. 697-706
- Print publication:
- March 2004
-
- Article
- Export citation
Atomic layer deposition of tantalum nitride for ultrathin liner applications in advanced copper metallization schemes
-
- Journal:
- Journal of Materials Research / Volume 19 / Issue 2 / February 2004
- Published online by Cambridge University Press:
- 03 March 2011, pp. 447-453
- Print publication:
- February 2004
-
- Article
- Export citation
Synthesis and Spectroellipsometric Characterization of Y2O3-stabilized ZrO2-Au Nanocomposite Films for Smart Sensor Applications
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 830 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, DD10.10
- Print publication:
- 2004
-
- Article
- Export citation
Atomic Layer Deposition of Tantalum Nitride on Organosilicate and Organic Polymerbased Low Dielectric Constant Materials
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 812 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, F3.13
- Print publication:
- 2004
-
- Article
- Export citation
Room-temperature Photoluminescence at 1540 nm from Amorphous Silicon Carbide Films Implanted with Erbium
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 815 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, J5.29
- Print publication:
- 2004
-
- Article
- Export citation
Low-temperature metalorganic chemical vapor deposition of Al2O3 for advanced complementary metal-oxide semiconductor gate dielectric applications
-
- Journal:
- Journal of Materials Research / Volume 18 / Issue 8 / August 2003
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1868-1876
- Print publication:
- August 2003
-
- Article
- Export citation
Enhancement of Copper Wetting via Surfactant-Based Post-Treatment of Ultra-Thin Atomic Layer Deposited Tantalum Nitride Liners
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E10.3
- Print publication:
- 2003
-
- Article
- Export citation